发明名称 Verfahren und Vorrichtung zur Verarbeitung von mehrphotonen-aushärtbaren photoreaktiven Zusammensetzungen
摘要 A method including providing a substrate having thereon a layer including a multiphoton polymerizable composition, applying a light beam to at least one region of the layer, wherein the light beam cures or initiates cure of the multiphoton curable photoreactive composition; and processing a portion of the light beam reflected off the substrate to obtain a location signal of an interface between the layer and the substrate at each region.
申请公布号 DE112006003494(T5) 申请公布日期 2008.10.30
申请号 DE20061103494T 申请日期 2006.12.20
申请人 3M INNOVATIVE PROPERTIES CO. 发明人 SYKORA, CRAIG R.;REED, STEVEN C.;WETZELS, SERGE;LEATHERDALE, CATHERINE A.;ATKINSON, MATTHEW R.C.
分类号 H01L21/027;G02B6/00;G03C1/73 主分类号 H01L21/027
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