发明名称 |
Verfahren und Vorrichtung zur Verarbeitung von mehrphotonen-aushärtbaren photoreaktiven Zusammensetzungen |
摘要 |
A method including providing a substrate having thereon a layer including a multiphoton polymerizable composition, applying a light beam to at least one region of the layer, wherein the light beam cures or initiates cure of the multiphoton curable photoreactive composition; and processing a portion of the light beam reflected off the substrate to obtain a location signal of an interface between the layer and the substrate at each region. |
申请公布号 |
DE112006003494(T5) |
申请公布日期 |
2008.10.30 |
申请号 |
DE20061103494T |
申请日期 |
2006.12.20 |
申请人 |
3M INNOVATIVE PROPERTIES CO. |
发明人 |
SYKORA, CRAIG R.;REED, STEVEN C.;WETZELS, SERGE;LEATHERDALE, CATHERINE A.;ATKINSON, MATTHEW R.C. |
分类号 |
H01L21/027;G02B6/00;G03C1/73 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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