| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that if a vacuum adsorption nozzle is close to an electronic component while it is charged with static electricity, the electronic component is swiftly carried away by a repulsive force of the static electricity or damaged by the electrostatic discharge because the miniaturized and weight-saved electronic component is light in weight. <P>SOLUTION: A vacuum adsorption nozzle 1 has an adsorbing plane 2 at its tip that vacuum-adsorbs an adsorbed object, and has a vacuum hole 3 prepared on the adsorbing plane 2 wherein the base substrate is composed of ceramic, and the side surface is coated with a layer 7 composed of ceramic containing a conductivity-imparting material or with a layer 7 composed of the conductivity-imparting material. Even if the vacuum adsorption nozzle 1 moves at high speed and is charged with electricity by air attrition, the electricity can be promptly removed by the layer 7. Thus, it is eliminated that the electronic component as an adsorbed object is quickly carried away by the repulsive force of static electricity, and electronic component damage by electrostatic discharge can be prevented. <P>COPYRIGHT: (C)2009,JPO&INPIT |
