| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for collecting data of a semiconductor manufacturing device that can collect process data from the semiconductor manufacturing device, even when the semiconductor manufacturing device and a production management system can not be connected online to each other, and to provide a semiconductor manufacturing system. <P>SOLUTION: The apparatus includes a production I/F unit 11 which communicates with the production management system 20, a device I/F unit 12 which communicates with the semiconductor manufacturing device 30, and a production management system alternative unit 13 which communicates with the semiconductor manufacturing device 30 through the device I/F unit 12. When the communication is possible between the production management system and production management system I/F unit, communications are carried out between the production management system and semiconductor manufacturing device to receive process data from the semiconductor manufacturing device and when possible, communications are performed between the production management system alternative unit and semiconductor manufacturing device through the device I/F unit to receive the process data. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
