发明名称 MOLD SUITABLE FOR WASHING, MOLD WASHING METHOD AND MOLD MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a mold capable of being simply washed at a low cost regardless of the kind of an adhered pollutant, a mold washing method and a mold manufacturing method. SOLUTION: The mold 100 having a mold main body 1 having a predetermined pattern and the washing film 2 deposited to the surface of the pattern is treated with a solvent or gas not damaging the pattern of the mold main body 1 to remove the pollutant adhered to the surface of the mold along with the washing film 2. Further, the washing film 2 is deposited to the mold main body 1 after washing by a predetermined method to regenerate the mold 100. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008260173(A) 申请公布日期 2008.10.30
申请号 JP20070103329 申请日期 2007.04.10
申请人 SCIVAX KK 发明人 KUSUURA TAKAHISA;TANPO HITOSHI
分类号 B29C33/72;B08B3/08;B08B3/10;B29C33/38;B29C59/02;H01L21/027 主分类号 B29C33/72
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