发明名称 |
MOLD SUITABLE FOR WASHING, MOLD WASHING METHOD AND MOLD MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a mold capable of being simply washed at a low cost regardless of the kind of an adhered pollutant, a mold washing method and a mold manufacturing method. SOLUTION: The mold 100 having a mold main body 1 having a predetermined pattern and the washing film 2 deposited to the surface of the pattern is treated with a solvent or gas not damaging the pattern of the mold main body 1 to remove the pollutant adhered to the surface of the mold along with the washing film 2. Further, the washing film 2 is deposited to the mold main body 1 after washing by a predetermined method to regenerate the mold 100. COPYRIGHT: (C)2009,JPO&INPIT
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申请公布号 |
JP2008260173(A) |
申请公布日期 |
2008.10.30 |
申请号 |
JP20070103329 |
申请日期 |
2007.04.10 |
申请人 |
SCIVAX KK |
发明人 |
KUSUURA TAKAHISA;TANPO HITOSHI |
分类号 |
B29C33/72;B08B3/08;B08B3/10;B29C33/38;B29C59/02;H01L21/027 |
主分类号 |
B29C33/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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