INK JET RECORDING HEAD AND ITS MANUFACTURING PROCESS

摘要

PROBLEM TO BE SOLVED: To raise a degree of integration of heating elements in an ink-jet head. SOLUTION: A beam is formed on a common liquid chamber and heating elements are formed on the beam and a substrate. An etching guide hole is formed to perform crystal anisotropic etching, thus forming a beam. COPYRIGHT: (C)2009,JPO&INPIT