| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface modification method and apparatus converting a low pressure ionized gas in a housing into plasma and irradiating a body to be irradiated with an electron beam from a cathode electrode, the method and apparatus being adapted to modify the inside surface of a cavity or a hole in the body to be irradiated by electron beam irradiation. SOLUTION: When the inside surface of the cavity or the hole in the body to be irradiated is slightly angled relative to or parallel with the electron beam irradiation axis, a permanent magnet or an electromagnet is arranged in the cavity so that a magnetic flux goes along a surface to be irradiated, thereby deflecting the electron beam axis, making irradiation on the inside surface possible and materializing the modification thereof. COPYRIGHT: (C)2009,JPO&INPIT
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