| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor tester capable of preventing oversight about mounting a positioning pin of a probe card or a contact probe holding block. SOLUTION: This semiconductor tester comprises mounting position holes disposed in the probe card and the contact probe holding block, and mounting position pins that are inserted into the mounting position hole and align the probe card and the contact ring mutually. The semiconductor tester also comprises ring-like electrode sleeves inserted into the mounting position holes of the probe card, a conducting means for electrically conducting between the electrode sleeves, contact pressure securing means that are disposed in the mounting position holes of the contact probe holding block, and apply a pressing force to the mounting position pins on its one end side to secure the contact pressure of the mounting position pins, a power supply connected between other ends of the contact pressure securing means, and a determining circuit for determining whether the contact probe holding block is accurately positioned to the probe card with a current signal of the power supply. COPYRIGHT: (C)2009,JPO&INPIT
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