| 摘要 |
A catadioptric projection objective has a plurality of optical elements arranged along an optical axis to image a pattern provided in an object surface of the projection objective onto an image surface of the projection objective, the optical elements including a catadioptric optical element having a body made from a transparent material, a first surface on an object-side of the body and a second surface opposite to the first surface. The second surface has a transmissive portion in a central region around the optical axis and a concave reflective portion in a zone around the transmissive portion. The first surface has a transmissive zone configured to transmit radiation coming from the object surface towards the second surface and oriented relative to the second surface such that at least a portion of radiation reflected by the reflective portion of the second surface is totally reflected by the transmissive portion of the first surface towards the transmissive portion of the second surface. |
