| 摘要 |
A scan type dual moire inspection apparatus and method are provided to inspect the three dimensional shape of an object by scanning the object while transferring it at the state a lattice element for generating the moire pattern is fixed, thereby reducing the manufacturing cost of a moire inspection apparatus. In a scan type dual moire inspection apparatus which comprises an X-Y table(10), a pattern projector(20), and a plurality of first and second imaging units(30,40), the pattern projector irradiates pattern beam to an object positioned in the X-Y table and the object is transferred with the X-Y table N times by 1/N pitch of the irradiated pattern. The first and second imaging units take a pattern image by the reflected pattern beam every 1/N pitch transfer. In order to acquire a stable pattern image, the measurement reference surface of the first and second imaging units is adjusted for the X-Y table every 1 pitch transfer of the object.
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