SYSTEM AND METHOD FOR SHIFTING PHASE IN A MULTI-WAVELENGTH INTERFEROMETRIC IMAGING SYSTEM

摘要

The optical subsystem of a first preferred embodiment may be used for a multi- wavelength interferometric imaging system outputting an object beam having a first phase and a reference beam having a second phase. The optical subsystem preferably includes an optical element; a sensor that measures movement of the optical element and relates the movement to a phase difference of the first phase of the object beam and the second phase of the reference beam; and a piezo that changes the position of the optical element to change the phase difference of the first phase of the object beam and the second phase of the reference beam.