| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mounting member of a semiconductor light-emitting element whose effective reflection factor of light is improved more than before in a metal film functioning as an electrode layer and/or reflective layer, and to provide a method of manufacturing the same. <P>SOLUTION: Metal films 11 and 12 are formed, which are composed of Ag, Al, or alloy containing these metals, particle sizes of whose crystal grains being 0.5 μm or less, and center line average surface roughness Ra of the surface being 0.1 μm or less, on a substrate 10 at a substrate temperature of 120°C or less with a deposition rate being 1.0 nm/s or more by physical vapor deposition. <P>COPYRIGHT: (C)2009,JPO&INPIT |
