| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology for surely and easily performing the tuning of a PID constant in a device for carrying out heat treatment to a body to be treated by controlling temperature by PID control. SOLUTION: A PID constant is set, and a temperature profile is acquired by raising the temperature of a treatment atmosphere, and when a difference between the value of a temperature characteristic item and a target value deviates from an allowable range, the PID constant is changed and reset with a change rate corresponding to the predicted change quantity of the temperature characteristic item corresponding to the difference by referring to a rule table 84, and the similar step is repeated until the difference reaches the allowable range, and a corresponding relation between the PID constant in the rule table and the predicted change quantity of the temperature characteristic item is updated based on the measured change quantity of the temperature characteristic item after using the rule table 84. In this case, the rule table is provided with a leaning function. COPYRIGHT: (C)2009,JPO&INPIT
|
