发明名称 |
OPTICAL APPARATUS, MULTILAYER-FILM REFLECTIVE MIRROR, EXPOSURE APPARATUS, AND DEVICE |
摘要 |
An optical apparatus comprises a plurality of multilayer-film reflective mirrors that are capable of reflecting an electromagnetic wave in an extreme ultraviolet region. The multilayer-film reflective mirrors are arranged along an optical axis of the electromagnetic wave, and at least two of the multilayer-film reflective mirrors have reflecting wavelength characteristics being different from each other, in a wavelength region other than the extreme ultraviolet region.
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申请公布号 |
US2008268380(A1) |
申请公布日期 |
2008.10.30 |
申请号 |
US20080098238 |
申请日期 |
2008.04.04 |
申请人 |
MURAKAMI KATSUHIKO;KOMIYA TAKAHARU |
发明人 |
MURAKAMI KATSUHIKO;KOMIYA TAKAHARU |
分类号 |
F21V9/06;G03F7/20 |
主分类号 |
F21V9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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