发明名称 APPARATUS FOR CATHODIC VACUUM-ARC COATING DEPOSITION
摘要 Apparatus for cathodic vacuum-arc coating deposition. The apparatus includes a mixing chamber, at least one input duct projecting from a first end wall of the mixing chamber, and an output duct projecting from a second end wall of the mixing chamber. Coupled with each input duct is a plasma source adapted to discharge an ion flow of a coating material into the mixing chamber, which is subsequently directed to the output duct. A first solenoidal coil disposed about a side wall of the mixing chamber creates a first magnetic field inside the mixing chamber for steering the ion flow. A second solenoidal coil is disposed adjacent to the first end wall and aligned substantially coaxially with the output duct. The second solenoidal coil creates a second magnetic field inside the mixing chamber for steering the first ion flow. The electrical currents flow through the first and second solenoidal coils in opposite solenoidal directions.
申请公布号 US2008264341(A1) 申请公布日期 2008.10.30
申请号 US20070740592 申请日期 2007.04.26
申请人 VEECO INSTRUMENTS INC. 发明人 DRUZ BORIS;AKSENOV IVAN I.;LUCHANINOV OLEXANDR A.;STREINYTSKIY VOLODYMYR E.;VASYLYEV VOLODYMYR V.;ZARITSKIY ISAAK;SFERLAZZO PIERO
分类号 C23C16/44 主分类号 C23C16/44
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