| 摘要 |
METHOD OF EXAMINING APERTURE DIAMETER OF DISK SUBSTRATE HAVING CIRCULAR APERTURE IN CENTRAL PORTION THEREOF AND APPARATUS THEREOF The present invention relates to a method of examining an aperture diameter of a disk substrate having a circular aperture in the central portion thereof, the method including: attempting to, pass a standard sphere for the aperture diameter through the aperture; and inspecting the aperture diameter of the disk substrate, based on whether the sphere passes through the aperture or not. Furthermore, the present invention relates to an examination apparatus thereof.
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