| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable thin-film transistor array substrate having stable performance, a manufacturing method thereof, and a display unit. SOLUTION: The thin-film transistor array substrate according to this invention comprises a semiconductor layer 3a formed on a substrate 1 and having source/drain regions 31a and a channel region 32a wherein the dimension of the source/drain regions 31a in the channel width direction is smaller than the channel width of the channel region 32a, a gate insulating film 4a formed on the semiconductor layer 3a, a gate electrode 5 arranged oppositely to the channel region 32a via an gate insulating film 4a, an interlayer insulating film 6 covering the gate electrode 5 and the gate insulating film 4a, and metal electrodes 8 connected with the source/drain regions 31a via the contact holes 7a and 7b penetrating the interlayer insulating film 6 and the gate insulating film 4a. COPYRIGHT: (C)2009,JPO&INPIT |
