| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor for confirming a shape/a position capable of confirming the shape and position of a substrate. SOLUTION: The sensor (150) for confirming the shape/the position has a sheet-shaped piezoelectric material (151) with a pressure-measuring region (X1). The pressure-measuring region has a plurality of the first pair of band-shaped electrodes arranged in the specified direction on one surface of the sheet-shaped piezoelectric material and a plurality of the second pair of the band-shaped electrodes arranged in the direction at the fixed angle to the specified direction on the other surface of the sheet-shaped piezoelectric material. In the sensor, the pressure-measuring region is disposed in conformity with the shape of the sheet-shaped measuring object, and measures voltages among the first pair of the band-shaped electrodes and the second pair of the band-shaped electrodes, and a pressure distribution in the pressure-measuring region is measured, thus configuring the shape and position of the sheet-shaped measuring object so as to be able to be confirmed. COPYRIGHT: (C)2009,JPO&INPIT
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