发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME, AND DEVICE APPLICATION SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a high-performance semiconductor device manufactured by using a semiconductor surface treatment that can achieve a surface protection and a surface passivation using a baron nitride film, a deposition process, its surface protection technology, and surface passivation technology and an electronic device for communication system containing the semiconductor device. SOLUTION: The semiconductor device has a film containing at least boron and nitrogen atoms. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008263212(A) 申请公布日期 2008.10.30
申请号 JP20080131238 申请日期 2008.05.19
申请人 WATANABE SHOKO:KK;SUGINO TAKASHI 发明人 SUGINO TAKASHI;KUSUHARA MASAKI;UMEDA MASARU
分类号 H01L21/318;H01L21/331;H01L21/335;H01L21/337;H01L21/338;H01L29/20;H01L29/737;H01L29/778;H01L29/812 主分类号 H01L21/318
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