发明名称 SEMICONDUCTOR INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To achieve the combination of independent optimum input and output bus width by equipping with a data transmission controller for effecting equivalent transmission capacity conversion between parallel-serial to permit customization by making a parallel bus width and a serial lane independent. SOLUTION: The semiconductor inspection device is provided with a data transmission device comprising: an equivalent transmission capacity conversion, having a buffer memory adjusted so that whose width coincides with the larger side of either a parallel width or the width of serial lane number, a prestage bus switching unit for filling input data into the buffer memory without remaining vacant space, and a poststage bus switching unit for filling read-out data into the width of serial lane of arbitrary number without remaining vacant space; and an equivalent transmission capacity reverse conversion having the prestage bus switching unit for filling input data into the buffer memory without remaining vacant space and a postbus switching unit for filling data read out of the buffer memory into the parallel bus having an arbitrary width without remaining vacant space. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008263020(A) 申请公布日期 2008.10.30
申请号 JP20070103814 申请日期 2007.04.11
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 SAKURAI YUICHI;TOBA TADANOBU;KIKUCHI SHUJI
分类号 H01L21/66;G06F13/38 主分类号 H01L21/66
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