| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that throughput of the whole plant is reduced because an overhead hoist transport waits for a processor to process in a process step for delivering containers from the overhead hoist transport equipped in the semiconductor manufacturing plant to the processor. SOLUTION: The device 1 for delivery and receipt, keeping and feeding of containers temporarily receives the containers 3 from the overhead hoist transport 5, keeps them and selects and transfers one of the kept containers in order of importance to the processor 6 or the like. To this end, the device 1 is suspended from the ceiling below the overhead hoist transport 5 and above the processor 6. COPYRIGHT: (C)2009,JPO&INPIT
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