摘要 |
PROBLEM TO BE SOLVED: To provide a crucible for evaporating a metal, which can prevent that temperature stability becomes insufficient because a material to be evaporated can migrate in various areas of a crucible and can also dissolve portions of the crucible. SOLUTION: The evaporation crucible includes: an electrically conductive chamber tube 120 having a wall such that an enclosure is formed and a tube axis; a first electrical connection 162; a second electrical connection 182; at least one feeding opening 134; and at least one distributor orifice 170 of the chamber tube, wherein the enclosure includes a melting-evaporation area. COPYRIGHT: (C)2009,JPO&INPIT
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