发明名称 |
COATER/DEVELOPER, COATING/DEVELOPING METHOD, AND STORAGE MEDIUM |
摘要 |
A coater/developer is disclosed that includes a heating module having a pair of rotary bodies configured to rotate about respective horizontal axles, the rotary bodies being spaced apart from each other in a direction along the conveyance path of a substrate so that the rotational axles thereof are parallel to each other; a conveyance path member engaged with and extended between the rotary bodies so as to move along an orbit, the conveyance path member forming a part of the conveyance path of the substrate placed on the conveyance path member; a first transfer part provided at the upstream end of the conveyance path; a second transfer part provided at the downstream end of the conveyance path; and a heating part provided between the upstream end and the downstream end of the conveyance path and configured to heat the substrate.
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申请公布号 |
US2008266532(A1) |
申请公布日期 |
2008.10.30 |
申请号 |
US20080107496 |
申请日期 |
2008.04.22 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
MATSUOKA NOBUAKI;HASHIMOTO TAKAHIRO;TSUCHIYA KATSUHIRO;HAYASHI SHINICHI;HAYASHIDA YASUSHI |
分类号 |
G03B27/32;G03F7/20 |
主分类号 |
G03B27/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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