发明名称 Method of Manufacturing Semiconductor Device, and Semiconductor Device
摘要 A semiconductor device including a substrate, a metal wiring on the substrate, an insulation film on the substrate covering the metal wiring, a connection hole in the insulation film which extends to a portion of the metal wiring, a via in the connection hole, and an alloy layer. The metal wiring includes a first metallic material, the alloy layer comprises a portion of the metal wiring and a second metallic material which is different than the first metallic material, and the via extends to the alloy layer.
申请公布号 US2008265418(A1) 申请公布日期 2008.10.30
申请号 US20080147572 申请日期 2008.06.27
申请人 SONY CORPORATION 发明人 ARAKAWA SHINICHI
分类号 H01L23/52 主分类号 H01L23/52
代理机构 代理人
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