发明名称 |
FACILITY FOR DEPOSITING LUBRICANT COATING ON HARD MAGNETIC DISKS |
摘要 |
<p>A facility for depositing lubricant coatings on hard magnetic disks includes load and unload vacuum locks in which cassettes carrying hard magnetic disks to be coated with a lubricant coating are turned 90°. Lubricant coatings are simultaneously deposited on a plurality of hard magnetic disks in a process module. Plural cassettes carrying the hard magnetic disks are simultaneously located in the load and unload vacuum locks. Plural cassettes carrying the hard magnetic disks are simultaneously located in a buffer zone between a load vacuum lock and the module for depositing the lubricant coatings.</p> |
申请公布号 |
WO2008131349(A1) |
申请公布日期 |
2008.10.30 |
申请号 |
WO2008US61040 |
申请日期 |
2008.04.21 |
申请人 |
INTEVAC, INC.;CARL, PETERSEN |
发明人 |
CARL, PETERSEN |
分类号 |
G11B5/72;G11B5/84 |
主分类号 |
G11B5/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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