| 摘要 |
A temperature control device is provided to control a temperature of an object to a required temperature rapidly by including a bypass path to circulate a fluid in a temperature control unit without passing through a heating path and a cooling path. A heating path(40) heats a fluid and circulates the fluid in a temperature control unit. A cooling path(20) cools down the fluid and circulates the fluid in the temperature control unit. A bypass path(30) circulates the fluid in the temperature control unit without passing through the heating path and the cooling path. A control unit(24,34,44) controls a flow rate of the fluid outputted to the temperature control unit through a confluence unit where the fluids join from the heating path, the cooling path, and the bypass path.
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