| 摘要 |
The present invention is to provide an electrostatic chuck which has enough absorption power for the glass substrate with a low applied voltage. The electrostatic chuck that absorbs the glass substrate, wherein the electrostatic chuck includes the electrode pair(4a,4b) which are disposed in the ceramic material; the volume resistivity of the ceramic material is 1x108Фcm or 1x1014Фcm; the thickness of the ceramic material of the adsorption surface covering the electrode pair is 100‘í or 200‘í; the width of the pattern of the electrode pair is 0.5mm or 1mm; and the minimum distance between the electrode pair is 0.5mm or 1mm.
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