| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor hardly generating dispersion in a capacitance change, capable of improving detection accuracy. <P>SOLUTION: This sensor equipped with a detection element 1 having an acceleration detection part is constituted as follows: the detection element 1 has a fixed part 4 connecting weight parts 2 through a flexible part, a counter substrate 6 facing to the weight parts 2 through a gap formed by a gap specification means, and first to fourth counter electrodes 14, 16, 18, 20 arranged on each facing surface of the weight parts 2 and the counter substrate 6, and detects each capacitance change of the first to fourth counter electrodes 14, 16, 18, 20, to thereby detect the acceleration; and the gap specification means is formed by forming a projection part 13 comprising a photosensitive resin on the fixed part 4, and by placing the counter substrate 6 on the projection part 13. <P>COPYRIGHT: (C)2009,JPO&INPIT |
