| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical diaphragm apparatus where positioning precision in the aperture part of a diaphragm in each NA value is improved, using a simple constitution. SOLUTION: Disclosed is an optical diaphragm apparatus comprising a circular base plate; a plurality of aperture blades, each being provided with a pin member and a cam member, and rotatably supported to the base plate by the pin member; and a circular cam disk with a cam groove, into which the cam member is movably inserted, and rotating the aperture blades, wherein one region of the plurality of aperture blades is mutually overlapped, and by mutually sliding the plurality of aperture blades, a diaphragm aperture part, having the prescribed number of apertures, is formed. The pin member and the cam member are provided, with the light-shielding region of the aperture blades forming the diaphragm aperture part and blocking the light in-between. COPYRIGHT: (C)2009,JPO&INPIT |
