| 摘要 |
PROBLEM TO BE SOLVED: To keep the lyophilic of a nozzle unit 32 and a distal end lens 191 and to highly accurately maintain exposure accuracy. SOLUTION: The optical cleaning member 101 is provided with a roughly flat plane 101a where illumination light IL is transmitted and a reflecting surface 101b composed of a spherical surface for reflecting the illumination light IL transmitted through the plane 101a in a different direction corresponding to a position relative to the illumination light IL relating to a Y axis direction. Thus, just by changing the relative position relating to the Y axis direction with the illumination light IL of the optical cleaning member 101, the different positions of the lower surface of the nozzle unit 32 and the lower surface of the distal end lens 191 are irradiated with the illumination light IL reflected on the reflecting surface 101b and transmitted through the plane 101a. Thus, the wide range of the lower surface of the nozzle unit 32 and the lower surface of the distal end lens 191 is optically cleaned. COPYRIGHT: (C)2009,JPO&INPIT
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