| 摘要 |
Briefly, in accordance with one or more embodiments, a MEMS device for a scanner system may include one or more magnets disposed on the side of the MEMS die opposite to the reflectance path of the scanning mirror without requiring magnets to be disposed on the side of the die that is the same side of the reflectance path of the scanning mirror. As a result of such an arrangement of the one or more magnets, there is no optical obstruction of the incoming and/or outgoing light beams. Likewise, fewer parts may be required for MEMS device and/or the scanning module, and the assembly process of scanning module may be substantially simplified.
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