SCRIBING APPARATUS AND METHOD

摘要

Provided are a novel scribing apparatus and a novel scribing method, by which a deep vertical crack can be formed without damaging a brittle material substrate (W) such as a hard glass substrate. The scribing apparatus is provided with a scribing wheel (34) wherein bottom sections of two cones sharing a rotating shaft (60) intersect and form a circumference ridge line (62), a plurality of notches (64) and protruding sections (65) are alternately formed along the circumference ridge line (62) in the circumference direction, the protruding section (65) is composed of a portion of the circumference ridge line (62), which is a portion left by notching the circumference ridge line (62) and has the length in the circumference direction. The length (a) of a notch (64) in the circumference direction is shorter than a length (b) in the circumference direction of the protruding section (65). The scribing apparatus is also provided with a scribe head (24) having an oscillation actuator (35) which oscillates a scribing wheel (34) in a direction intersecting with the surface of the brittle material substrate (W), and a moving mechanism (25) which moves the scribe head (24) along the surface of the brittle material substrate (W).