METHOD OF DESIGNING SEMICONDUCTOR INTEGRATED CIRCUIT, APPARATUS FOR DESIGNING SEMICONDUCTOR INTEGRATED CIRCUIT, RECORDING MEDIUM, AND METHOD FOR MANUFACTURING MASK

摘要

PROBLEM TO BE SOLVED: To simplify a design of a semiconductor integrated circuit without deteriorating screening accuracy.

SOLUTION: A method of designing the semiconductor integrated circuit upon creating a physical layout of the semiconductor integrated circuit from semiconductor integrated circuit data includes: a cell arranging and wiring step of arranging and wiring cells for creating a physical layout; a design-rule checking step of verifying a shape of a second physical layout including the cells of the physical layout with reference to a rule library for design rule check; a mask-data processing step of performing, when the design rule is not satisfied, mask data processing for the verification-object second physical layout; a mask-data creating step for creating mask data using the second physical layout subjected to the mask data processing in the mask-data processing data; and a mask-data creating step of creating mask data corresponding to the physical layout using the second physical layout when the design rule is satisfied.

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