SHUTTER MIRROR AND EXPOSING EQUIPMENT HAVING THE SAME

摘要

A shutter mirror and exposing equipment having the same are provided to minimize light loss generated while the light is transmitted to the RA block from the shutter mirror. A shutter mirror comprises an optical passage part(320) in which the light is passed; and an optical reflection part(350) in which the light is reflected and is placed at the side of the optical passage part. The optical reflection part reflects so that the width is reduced as it becomes distant from the optical reflection part after the light bumps against the optical reflection part.