METHOD OF SOLIDIFICATION OF RESIDUAL MELT IN CRUCIBLE

摘要

PROBLEM TO BE SOLVED: To provide a method by which cracking of a quartz crucible and leakage of a residual melt are prevented and the residual melt in the crucible is solidified more safely in Czochralski method. SOLUTION: The invention relates to a method to solidify a melt (residual melt) left in a quartz crucible 45 after the melt in the quartz crucible 45 is heated with a heater 47 and a crystal is pulled. The method comprises a step of keeping the height of the central position 48 of the heat generation of the heater 47 within 20 mm from the surface 44 of the melt after the pulling of the crystal is completed by relatively moving up and down the crucible 45 and the heater 47 and a step of cutting off the supply of electricity. COPYRIGHT: (C)2009,JPO&INPIT