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发明名称
Gasentladungslaser
摘要
申请公布号
DE60135806(D1)
申请公布日期
2008.10.30
申请号
DE20016035806
申请日期
2001.06.08
申请人
EBARA CORP.
发明人
OOYAMA, ATUSHI;SEKIGUCHI, SHINICHI;SHINOZAKI, HIROYUKI;BARADA, TOSHIMITSU;NAKAZAWA, TOSHIHARU
分类号
F16C32/04;H01S3/036;F16C39/06;H01S3/03;H01S3/225;H02K7/09;H02K7/14
主分类号
F16C32/04
代理机构
代理人
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