| 摘要 |
A MEMS mirror is provided to increase light efficiency of a driving mirror and reduce damping by solving a problem of resistance between a mirror and air in high frequency operation. A support frame(103) is supported by two torsion bars penetrating a silicon substrate up and down. A cantilever beam(101) has sharp both wings which is narrow compared to the width and is connected to two torsion bars symmetrically. A coil wire is placed at the backside of the cantilever beam pass a current.
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