| 摘要 |
Briefly, in accordance with one or more embodiments, an operational state of a MEMS device of a scanner system may be determined. In the event it is determined that the MEMS device is possibly operating in an unsafe mode, the laser may be turned off and/or the MEMS device may be shut down. An operational state of the MEMS device may be determined for example by obtaining a MEMS drive voltage sense signal and/or a MEMS drive current sense signal, and a potentially unsafe mode of operation may be identified if one or more of such signals are not at proper values with respect to predetermined threshold values.
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