发明名称 |
APPARATUS AND METHOD FOR MEASURING DEFORMATION OF A CANTILEVER USING INTERFEROMETRY |
摘要 |
Apparatus and method for measuring the deformation of a tethered or untethered cantilever by projecting a radiation beam onto the cantilever, detecting an interference pattern reflected from or transmitted through the cantilever, and calculating the deformation of the cantilever by measuring the intensity variation within at least a portion of the interference pattern. |
申请公布号 |
WO2008129272(A1) |
申请公布日期 |
2008.10.30 |
申请号 |
WO2008GB01375 |
申请日期 |
2008.04.17 |
申请人 |
UNIVERSITY COLLEGE LONDON;AEPPLI, GABRIEL;DUECK, BENJAMIN |
发明人 |
AEPPLI, GABRIEL;DUECK, BENJAMIN |
分类号 |
G12B21/20 |
主分类号 |
G12B21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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