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发明名称
In-situ Messmethode und Halbleiterherstellungsapparat
摘要
申请公布号
DE69939573(D1)
申请公布日期
2008.10.30
申请号
DE19996039573
申请日期
1999.11.16
申请人
INFINEON TECHNOLOGIES AG;INTERNATIONAL BUSINESS MACHINES CORP.
发明人
FLIETNER, BERTRAND;MULLER, K. PAUL
分类号
G05B19/00;H01L21/66;G05D23/00;H01L23/544
主分类号
G05B19/00
代理机构
代理人
主权项
地址
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