| 摘要 |
A tunable filter device, a tunable filter module, and a method for manufacturing the same are provided to reduce a driving voltage applied between a signal line and a driving capacitor electrode by securing a sufficient size of a driving electrode for driving the capacitor electrode. A tunable filter device includes a substrate(10), a signal line(21), a driving capacitor electrode, a driving electrode, and a ground line. The signal line is positioned between two ground lines(22) extended in parallel on the substrate. The driving capacitor electrode(24) crosses between the ground lines and includes a portion(24a) facing the signal line. The driving electrode(25) is positioned between the signal line and the ground line and generates an electrostatic attractive force in an interval with the driving capacitor electrode. The ground line(12a) is installed in the substrate, includes a portion facing the signal line, and connects the ground line electrically. The driving capacitor electrode and the ground lines comprise a ground wiring unit. The signal line and the ground wiring unit comprise a distribution constant transmission line.
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