System und Methode zur Echtzeiterfassung der in-situ Emission eines Werkstückes bei der Bearbeitung,申请号DE2000640253-传众专利搜索

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发明名称	System und Methode zur Echtzeiterfassung der in-situ Emission eines Werkstückes bei der Bearbeitung
摘要
申请公布号	DE60040253(D1)	申请公布日期	2008.10.30
申请号	DE2000640253	申请日期	2000.03.28
申请人	AXCELIS TECHNOLOGIES INC.	发明人	HEBB, JEFFREY PAUL;SHAJII, ALI
分类号	H01L21/66;G01J5/00;G01J5/02;G01J5/10;H01L21/205;H01L21/26	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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