发明名称 |
Mikromechanisches Bauelement |
摘要 |
A micromechanical component, in particular an acceleration sensor, includes a substrate, at least one spring element and at least one seismic mass. The spring element is joined at a first end to the substrate and at a second end to the mass, and the rigidity of the spring element is set such that a movement of the mass relative to the substrate can be caused by an acceleration parallel to a surface of the substrate. For the spring element, provision is made for a spring limit stop which limits a deformation of the spring element in response to an acceleration parallel to the surface of the substrate. |
申请公布号 |
DE19817357(B4) |
申请公布日期 |
2008.10.30 |
申请号 |
DE1998117357 |
申请日期 |
1998.04.18 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
FEHRENBACH, MICHAEL;SCHUBERT, DIETRICH;VOSSENBERG, HEINZ-GEORG |
分类号 |
G01P15/135;B62D57/00;B81B3/00;B81B5/00;G01D11/02;G01P15/08;G01P15/125 |
主分类号 |
G01P15/135 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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