| 摘要 |
Apparatus and method for measuring and controlling static charge inside vacuum equipment. In-line gas ionizers deliver gas ions to pass-through doors, load-locks, vacuum cluster vent lines, or neutralizing chambers. Static charge measurement is accomplished while the wafer or product remains in a vacuum or near-vacuum. In one embodiment, a neutralizing chamber and measurement chamber are combined. The neutralizing module (14) receives neutralizing gas ions from a neutralizing ionizer (15) through a neutralizing ion delivery line (30). Pressurized neutralizing gas (32) is supplied to the neutralizing ionizer via a neutralizing gas line (31), and neutralizing gas ions are produced by the neutralizing ionizer. This invention has application in semiconductor, disk drive, and fiat panel industries.
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