| 摘要 |
A method for formation of nitrided/carburized layer on stainless steel by the application of low temperature plasma technique is provided to improve he load-bearing capacity by ensuring enough thickness of stiffened layer. A method for formation of nitrided/carburized layer on stainless steel performs as follows 1) a preprocess step(S1) which pre-processes the base material and charged at the chamber; 2) a step(S2) it injects the gas for the pre-sputtering into the chamber, and where the chamber decides on the surface of the base material to the Han plasma-generating in the voltage authorization of the pressure maintenance of the temperature keeping of 300deg.C~470deg.C and 1~10Torr and 300~1000V for 50 minutes ~2 hours with pre-sputtering; 3) a carburizing step(S3) injecting the mixed gas in which the volume ratio is comprised of the H2 of 50~94%, the Ar of 5~40%, and the CH4 of 1~10% into the chamber and forms the supersaturation carbon layer into plasma-generating by the voltage authorization of the pressure maintenance of the temperature of 400~700deg.C and 1~10Torr and 400~1000V for 1~50 hours; 4) a nitrification treatment step(S4) injecting the mixed gas in which the volume ratio is comprised of the H2 of 10~85%, the Ar of 5~40%, and the N2 of 10~85% into the chamber and forms the supersaturation nitrogen layer into plasma-generating by the voltage authorization of the pressure maintenance of the temperature of 300~390deg.C and 1~10Torr and 400~1000V for 1~10 hours; 5) a formation method of the stainless steel carburization nitride layer using the low temperature plasma technique wherein the cooling step(S5) carrying the base material out is performed in the chamber after cooling the chamber to 250deg.C.
|
