A DETECTOR MODULE WITH PIXELATED SCINTILLATORS FOR RADIATION IMAGING AND THE MANUFACTURING METHOD THEREOF

摘要

A radiological image detector module having an integrated pixelated scintillator and a manufacturing method are provided to prevent the diffusion of light by reducing an error in the combining process of the lighting-emitting part and photo-sensor part. A unit pixel(400) of a radiological image detector module includes a photo-sensor part(100) in which a plurality of photo diodes are arranged in one-dimensional array form or two-dimensional plate-type matrix form; an oxide film(130) deposited thicker in the light-receiving zone(A) than the peripheral non-light-receiving zone(B); and a scintillator(300) deposited on the oxide film of the light-receiving zone. A method of manufacturing the radiological image detector module includes a step for preparing a pixel type photo-sensor part; a step for depositing the stepped oxide film on each photo diode of the photo-sensor part; and a step for depositing the scintillator directly on the oxide film of the light-receiving zone.