发明名称 |
Electronic component and method for manufacturing the same |
摘要 |
A method of manufacturing an electronic component includes the steps of: a) forming a plurality of wiring boards (100, 200; 300) that include first through holes (101A, 20 1 A; 301 A) penetrating through a semiconductor substrate and conductive material (104, 204; 305) buried in the first through holes; b) providing conductive projections (107; 310) on the conductive material of any of the plurality of wiring boards; and c) bonding the plurality of wiring boards to each other and electrically connecting the conductive material of the respective wiring boards by the projections. |
申请公布号 |
EP1926136(A3) |
申请公布日期 |
2008.10.29 |
申请号 |
EP20070022679 |
申请日期 |
2007.11.22 |
申请人 |
SHINKO ELECTRIC INDUSTRIES CO., LTD. |
发明人 |
MURAYAMA, KEI;TAGUCHI, YUICHI;SHIRAISHI, AKINORI;SUNOHARA, MASAHIRO;HIGASHI, MITSUTOSHI |
分类号 |
H01L21/48;H01L23/13;H01L23/14;H01L23/498;H01L23/538;H01L25/16 |
主分类号 |
H01L21/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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