发明名称 Electronic component and method for manufacturing the same
摘要 A method of manufacturing an electronic component includes the steps of: a) forming a plurality of wiring boards (100, 200; 300) that include first through holes (101A, 20 1 A; 301 A) penetrating through a semiconductor substrate and conductive material (104, 204; 305) buried in the first through holes; b) providing conductive projections (107; 310) on the conductive material of any of the plurality of wiring boards; and c) bonding the plurality of wiring boards to each other and electrically connecting the conductive material of the respective wiring boards by the projections.
申请公布号 EP1926136(A3) 申请公布日期 2008.10.29
申请号 EP20070022679 申请日期 2007.11.22
申请人 SHINKO ELECTRIC INDUSTRIES CO., LTD. 发明人 MURAYAMA, KEI;TAGUCHI, YUICHI;SHIRAISHI, AKINORI;SUNOHARA, MASAHIRO;HIGASHI, MITSUTOSHI
分类号 H01L21/48;H01L23/13;H01L23/14;H01L23/498;H01L23/538;H01L25/16 主分类号 H01L21/48
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