Thin film in anoptical information recording medium and process for producing the same

摘要

A method of manufacturing an optical information recording medium by forming a thin film in a part of an optical information recording medium by the use of a sputtering target formed from a material obtained by adding B 2 O 3 to an In 2 O 3 -ZnO-SnO 2 system compound oxide having SnO 2 as its primary component, wherein the sputtering target is formed from oxide composed with the respective element ratios being In/(In + Zn + Sn + B) = 0.01 to 0.41, Zn/(In + Zn + Sn + B) = 0.02 to 0.45, Sn/(In + Zn + Sn + B) = 0.13 to 0.81, and B/(In + Zn + Sn + B) = 0.09 to 0.66.