发明名称 A METHOD FOR THICKNESS MEASUREMENT OF DIPPING COATING LAYER ON WIRE
摘要 A method for measuring dip-coating thickness of a wire is provided to secure the uniformity of dip-coating and control the dip-coating thickness in the wire manufacturing process. A method for measuring dip-coating thickness of a wire includes a step(110) for coating dipping solution on the wire surface, a re-coating step(120) for forming a platinum(Pt) or tungsten(W) coating layer by using ion beam sputtering deposition(IBS/e) coating equipment in order to classify the coating layer before measuring the dip-coating thickness of the wire, a section step(130) for making a sample for coating thickness measurement of the re-coated wire, and a step(140) for measuring the coating thickness of the sample by using the TEM(Transmission Electron Microscope).
申请公布号 KR100865764(B1) 申请公布日期 2008.10.29
申请号 KR20070067702 申请日期 2007.07.05
申请人 KNU-INDUSTRY COOPERATION FOUNDATION 发明人 LIM, SUNG HWAN;YUN, JIN YOUNG;KIM, HYUNG GIUN;TARK, YONG DEOK;LEE, TAEG WOO
分类号 G01B21/08;G01N1/28;H01L21/02 主分类号 G01B21/08
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