发明名称 |
A METHOD FOR THICKNESS MEASUREMENT OF DIPPING COATING LAYER ON WIRE |
摘要 |
A method for measuring dip-coating thickness of a wire is provided to secure the uniformity of dip-coating and control the dip-coating thickness in the wire manufacturing process. A method for measuring dip-coating thickness of a wire includes a step(110) for coating dipping solution on the wire surface, a re-coating step(120) for forming a platinum(Pt) or tungsten(W) coating layer by using ion beam sputtering deposition(IBS/e) coating equipment in order to classify the coating layer before measuring the dip-coating thickness of the wire, a section step(130) for making a sample for coating thickness measurement of the re-coated wire, and a step(140) for measuring the coating thickness of the sample by using the TEM(Transmission Electron Microscope).
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申请公布号 |
KR100865764(B1) |
申请公布日期 |
2008.10.29 |
申请号 |
KR20070067702 |
申请日期 |
2007.07.05 |
申请人 |
KNU-INDUSTRY COOPERATION FOUNDATION |
发明人 |
LIM, SUNG HWAN;YUN, JIN YOUNG;KIM, HYUNG GIUN;TARK, YONG DEOK;LEE, TAEG WOO |
分类号 |
G01B21/08;G01N1/28;H01L21/02 |
主分类号 |
G01B21/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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