发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device and a method for manufacturing the same are provided to implement the low power consumption and reduce the junction capacitance by simplifying a process. A semiconductor device includes a base substrate(101); a semiconductor film(100) formed on the base substrate; a gate insulating layer(108) formed on the semiconductor film; and an electrode(109) formed on the gate insulating layer. The semiconductor film includes a channel forming region which is overlapped with the electrode by inserting the gate insulating layer. An opening(117) is formed between a concave part of the semiconductor film and the base substrate. The opening is connected with the opening. The insulating layer is formed between the base substrate and the semiconductor film.
申请公布号 KR20080095751(A) 申请公布日期 2008.10.29
申请号 KR20080028209 申请日期 2008.03.27
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 MIYAIRI HIDEKAZU
分类号 H01L21/20;H01L21/336 主分类号 H01L21/20
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