发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
A semiconductor device and a method for manufacturing the same are provided to implement the low power consumption and reduce the junction capacitance by simplifying a process. A semiconductor device includes a base substrate(101); a semiconductor film(100) formed on the base substrate; a gate insulating layer(108) formed on the semiconductor film; and an electrode(109) formed on the gate insulating layer. The semiconductor film includes a channel forming region which is overlapped with the electrode by inserting the gate insulating layer. An opening(117) is formed between a concave part of the semiconductor film and the base substrate. The opening is connected with the opening. The insulating layer is formed between the base substrate and the semiconductor film.
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申请公布号 |
KR20080095751(A) |
申请公布日期 |
2008.10.29 |
申请号 |
KR20080028209 |
申请日期 |
2008.03.27 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
MIYAIRI HIDEKAZU |
分类号 |
H01L21/20;H01L21/336 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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