发明名称 Workpiece holding jig
摘要 A workpiece holding jig for holding a workpiece having a plurality of first dividing lines extending in a predetermined direction and a plurality of second dividing lines formed in a direction intersecting the plurality of first dividing lines on the workpiece holding table of a processing machine for cutting the workpiece along the plurality of first dividing lines and the plurality of second dividing lines, wherein the workpiece holding jig has a plurality of through-grooves corresponding to the plurality of first dividing lines and the plurality of second dividing lines formed on the workpiece, a plurality of suction-holes which are open at the top and formed at positions corresponding to a plurality of areas sectioned by the plurality of first dividing lines and the plurality of second dividing lines of the workpiece and suction-passages that are formed at positions where they do not intersect the plurality of through-grooves and connected to the plurality of suction-holes.
申请公布号 US7438286(B2) 申请公布日期 2008.10.21
申请号 US20050104566 申请日期 2005.04.13
申请人 DISCO CORPORATION 发明人 UMAHASHI TAKAYUKI;KIMURA KEN
分类号 B24C5/02;B25B11/00;B28D1/04;B28D5/00;H01L21/00;H01L21/304 主分类号 B24C5/02
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